Electroplating such a thick layer is difficult (in my experience) because of
a very high residual stress of the electroplated nickel.  There may be ways
to reduce the stress in thick layers, but I'm not familiar with them.

I've had good luck masking with standard photoresist with electroless
nickel.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA 20151

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Terry Zhu
Sent: Tuesday, May 09, 2006 1:20 PM
To: [email protected]
Subject: [mems-talk] Masking layer for pyrex etching


Hi,

  Thanks, Ravi and Gareth. I guess the electroplating is needed for 15um
nickel. It is very thick layer.  Do you think sputtering a thin  layer of
gold/Cr good for masking layer or other capable thin films?

  Regards,

  Terry