hi all..

i'm new in MEMS field..now i'm working on mems
micromachining using 'wet etch' to fabricate suspended
micstructure for thermal isolated devices (V shape).
So far we have KOH as an etchant (etch rate=very
slow). i've decided to vary the etchant like EDP. Any
good reference for this instead of Marc J.Madou's
books, plz share with us..
tq..

cheers

Mohd Faizal Aziz
Institute of Microengineering and Nanoelectronics (IMEN)
Universiti Kebangsaan Malaysia