After you spin the SU8, let it sit overnight. Then do the prebake the next day.
It works for me. No bubbles.

Shivalik


> -----Original Message-----
> From: Jiang Ziling
> Sent: Friday, May 19, 2006 6:34 AM
> To: General MEMS discussion
> Subject: [mems-talk] Su8 2100 bubble problem
>
> Hello,
>
>   Does anyone know how to eliminate the air bubbles appearing after
> pre-baking of Su8 2100 at 95C?