Hi Kamesh,

I'm not sure if I've misunderstood your query. I've never used the resist
you mention but I have performed a similar process with Shipley 1813 on CVD
oxide coated GaAs. Could you not use acetone (or possibly an NMP based
stripper) to remove the resist after the BOE stage?

Maybe I have misunderstood and the resist has been subjected to high
temperatures?

Regards,

Novak

____________________________________________
Novak Farrington
Microelectronics and Nanostructures Group
School of Electrical and Electronic
Engineering Sackville Street Building
The University of Manchester