Contacy the phoresist company  and ask for the "Photoresist Stripper" for the
photoresist you are using. For example, you can use "AZ KWIK STRIP REMOVER" to
strip most of the AZ Photoresists.

  Good luck.

Novak Farrington  wrote:
  Hi Kamesh,

I'm not sure if I've misunderstood your query. I've never used the resist
you mention but I have performed a similar process with Shipley 1813 on CVD
oxide coated GaAs. Could you not use acetone (or possibly an NMP based
stripper) to remove the resist after the BOE stage?

Maybe I have misunderstood and the resist has been subjected to high
temperatures?