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MEMSnet Home: MEMS-Talk: Help needed for PMMA Exposure
Help needed for PMMA Exposure
2006-05-30
Abhay Kulkarni
2006-05-31
[email protected]
2006-05-31
Abhay Kulkarni
Help needed for PMMA Exposure
[email protected]
2006-05-31
you mis-typed the thickness....you have 5-8mm which requires x-ray.  You
meant 5-8 um.

Craig

--
Craig Friedrich, PhD, PE
Professor of Mechanical Engineering
Director, Multi-Scale Technologies Institute
Dept. of Mechanical Engr. - Engr. Mechanics
Michigan Technological University
1400 Townsend Drive
Houghton, MI 49931

phone: 906-487-1922
fax:   906-487-2822

> Hello all,
>
> I want to expose(crosslink) 950K A1 PMMA (Thickness of about 5-8mm) from
> Michrochem (suggested parameters by michrochem  : doses >500mJ/cm2 at peak
> wavelength of 248nm).
> But the aligner I am using does not have UV/X-ray capabilities, Has anyone
> encountered such problem?. Especially with such thick PMMA layer. What are
> my options? I was thinking of using an external exposure UV-C source.
>
> Any help in this regard will be grately appreciated.
reply
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