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MEMSnet Home: MEMS-Talk: Eagle Nt-90
Eagle Nt-90
2006-05-31
Carlos
Eagle Nt-90
Carlos
2006-05-31
Hello,

Can someone please suggest an after spinning NT-90 Eagle resist (2krpm,1 min)
baking time and temperature(using hot plate)?

I am using 5 min at 150C but after exposure(300mJ) everything gets stripped at
the development.Does somebody have a lithography recipe for this resist?(Eagle
NT-90)

Thank you,
Carlos
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