I am a new user of SU8-2100 photoresist.I have some difficult during my SU8
softbake process.
There are always some  bubbles to appear in my photoresist during my softbake
process at temperatue 75 to 80 degree C .My temperature ramp speed is 0.6 degree
C per minute.
Could anyone provide me any solutions to get rid of this problem.


Best regards,


Name¡GCheng-Yu Hsieh
Address¡GInstitute of MicroElectroMechanical System , National Tsing Hua
University, 101, Sec. 2, Kuang-Fu Road,Hsinchu ,Taiwan 300 , ROC
Tel¡G886-3-5735142
Fax¡G886-3-5738842
Mobile Phone¡G0928231151
Email¡[email protected]