I never had any luck using an oxygen plasma for PDMS to PDMS. Some
people say oxygen is essential - others say it only works in air. I
think the plasma power is very important (unfortunately I can't control
this well on my chamber).
I had good results using a contact transfer method. Just spin a thin
layer of mixed, uncured PDMS onto a flat wafer. Touch the structured
PDMS onto this wafer taking care it doesn't slide about. Then take it
off and bond it to a flat piece of PDMS and cure in the normal way.
Quake's method may be more suitable if you have small features that may
get messed up using the contact method.


mukul jain wrote:

> hi ,
> I need suggestion or help regd the bonding of pdms to pdms using pdms
> , is
> it possible successfuly..? if yes , then what should be the thickness of
> patterend pdms layers and what should be curing codition ( 60 deg. for 30
> min.?)? or RTV cana lso be used , if yes then what r conditions for
> curing ,
> same as pdms? any other alternative to bond pdms except oxygen plasma
> exposure..?