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MEMSnet Home: MEMS-Talk: Re: Looking for polymer films as etching mask against acid
Re: Looking for polymer films as etching mask against acid
1998-03-26
Sangeeta N Bhatia
1998-03-26
bob lyness
1998-03-30
John Karpinsky
1998-03-30
Joseph F. Shepard
Re: Looking for polymer films as etching mask against acid
Sangeeta N Bhatia
1998-03-26
Hi there-
I actually don't have an answer to your polymer film adhesion question,
but I have a question for you about parylene.  Do you have any
good references on it.  How are you depositing it? Any other tips
about it- I'm considering using it for some BioMEMs
work.
Thanks in advance
Sangeeta Bhatia, MD, PhD


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