Dear All,
  I need to build a wafer heating system upto 200C. For that I need  flexible
thin heaters  (one I have seen, coils embedded in  polymeric substrate). I don't
know the name of that kind. Could anyone  please help me with the name of
heaters of that kind and if possible  with the availabilty.
  Thanks,
  Biplab

Yi Yao  wrote:  Hi All,

I'm planning to do copper etching on micro features (the copper will be
approximately 2um in thickness, 20um in width and 200um in length).
For some reason, I must use sulfuric-peroxide etchant. Can anyone recommend
me some commercialized etchant (sulfuric-peroxide)
for micro copper etching? I tried Fisher and Transene, but didn't find any.
BTW, generally, it is a mixture of 96% sulfuric and 30% hydrogen peroxide
with some stablizers. It will also be very helpful if someone
can give me a clue on what kind of stablizers I should use, so that I can
make the etchant myself.

Thanks a lot and your help will be highly appreciated.

Best Regards,
Yi
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