Please let me know if you get any information on
this topic.

- Arun Majumdar

>Hi;
>I'm looking for the "Spray Coating method of Photoresist" because I need
>to coat PR into deep and big cavity on Silicon wafer(1.5mm deep and 2mm
>radius in 2mm thich 3inch wafer)
>Does anybody know the spray coating method for photoresist coating and
>equipment and vendor which is needed?   Any information would be welcomed.
>Thank you.
>
>
>
____________________________________
Arun Majumdar
Department of Mechanical Engineering
6169 Etcheverry Hall
University of California
Berkeley, CA 94720
Ph:     (510) 643-8199
Fax:    (510) 642-6163
Email:  [email protected]