Try Semi Tool in Calispel, MT.  I think they are developing a new tool...if
they haven't already.

RobMac

Cheol-Hyun Han wrote:

> Hi;
> I'm looking for the "Spray Coating method of Photoresist" because I need
> to coat PR into deep and big cavity on Silicon wafer(1.5mm deep and 2mm
> radius in 2mm thich 3inch wafer)
> Does anybody know the spray coating method for photoresist coating and
> equipment and vendor which is needed?   Any information would be welcomed.
> Thank you.