Phil
Why don't you use lift-off. It's straight forward and you can lift-off 1u

Regards
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Phillipe Tabada
Sent: Friday, July 07, 2006 8:44 PM
To: [email protected]
Subject: [mems-talk] Ion Mill Services

Hi,

  Looking for a company who can ion mill 1 um of Pt using photoresist as
a mask.  Then remove the mask using wet etching (no ashing).  This is for
low volume research quantities.

Phil