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MEMSnet Home: MEMS-Talk: Direct write UV laser photolithography
Direct write UV laser photolithography
2006-07-12
Corey Koch
Direct write UV laser photolithography
Corey Koch
2006-07-12
I am looking to purchase a laser direct write system for i-line photolithography
(primarily SU-8 resist).  I was curious if anyone who has used these systems
could comment on their experiences with specific brands or point me to vendors.
Thanks,
Corey
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