Hi Angelo,
I only know about dry etching by CF4/O2 or SF6/O2 plasma or laser ablation of PI
sheets. With both methods 60 µm holes can be realized.
Best,
Michael Zickar
--------------------------------------------
Institute of Microtechnology
University of Neuchatel
Jaquet-Droz 1
2000 Neuchatel
Switzerland
Tel.: +41 32 720 5525
Fax: +41 32 720 5711
-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Angelo Gobbi
Sent: Mittwoch, 12. Juli 2006 18:59
To: [email protected]
Subject: [mems-talk] Kapton wet etching
Hi,
Does anybody know how to wet etching Kapton?
I want to make 60um diameter hole in a 50um thick kapton foil.
Can any one suggest some etchant/methods?
Many thanks!
