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MEMSnet Home: MEMS-Talk: Kapton wet etching
Kapton wet etching
2006-07-12
Angelo Gobbi
2006-07-13
ZICKAR Michaël
2006-07-13
Michael D Martin
2006-07-13
Bill Flounders
Kapton wet etching
Michael D Martin
2006-07-13
Angelo,
   A wet etching technique for kapton was developed at CERN by Fabio
Sauli's group for making "GEM" radiation detectors.  As far as I know
they have kept the tricks to doing it close to the vest but I think it
involves the use of EDP (ethylene diamine pyrochatachol). You might be
able to find some vague information in the iterature. See
http://www.osti.gov/energycitations/servlets/purl/10149501-kxm6CU/native/1014950
1.pdf

Good luck,
    Mike

>>> "Angelo Gobbi"  07/12/06 12:58 PM >>>
Hi,

Does anybody know how to wet etching Kapton?
I want to make 60um diameter hole in a 50um thick kapton foil.

Can any one suggest some etchant/methods?

Many thanks!
reply
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