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MEMSnet Home: MEMS-Talk: Aluminum Thin Film by E-beam Evaporation
Aluminum Thin Film by E-beam Evaporation
2006-07-17
Sreemanth M Uppuluri
2006-07-17
pradeep # sharma
2006-07-17
Michael D Martin
Aluminum Thin Film by E-beam Evaporation
Sreemanth M Uppuluri
2006-07-17
Hello,

I am trying to obtain very low surface roughness films of Aluminum on Quartz
substrates using e-beam evaporation. Please let me know if there are any
recipes specific to this issue such as speed of deposition, pressure and so
on.

Thanks
Sreemanth


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