Ning,

The manufacturer does provide a SU-8 that is able to get to those
thickness that you specified. You will have to call the company and
request the material as it is not yet comercially avalible. Good luck.

Bruce

________________________________

From: mems-talk-bounces@memsnet.org on behalf of nwu
Sent: Mon 2006.07.17 14:24
To: mems-talk@memsnet.org
Subject: [mems-talk] Spin coating very thin PDMS film

I am wondering how to spin coating a very thin and uniform layer of PDMS
on silicon surface.  The thickness is about 150 - 300 nm. What kind of
solvent should I choose?  I used hexane before, but it does not give me
uniform surface during spin coating. Thanks

Ning