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MEMSnet Home: MEMS-Talk: Re: electrochemical etching apparatus
Re: electrochemical etching apparatus
1998-07-06
Armin Kuebelbeck
1998-07-06
John David Evans
Re: electrochemical etching apparatus
Armin Kuebelbeck
1998-07-06
Hi,

there is an Austrian company which has special tools for wafer thinning.
Their hompage is at http://www.sez.com
They do the thinning electroless and in acidic medium, because of
unwanted anisotropic etching effects. They can etch down to 100 µm and
less. General Chemicals Corporation has the right etchants for these
tools in USA. If you need a contact person there, just send me a mail.

Best regards

Armin


>Date: Sun, 5 Jul 1998 21:00:54 -0400 (EDT)
>From: "K.V.Madanagopal" 
>Subject: electrochemical etching apparatus
>To: [email protected]
>Reply-To: "K.V.Madanagopal" ,
[email protected]
>
>Hello!
>Are there any commercial suppliers of electrochemcial etch apparatus
for
>thinning Si wafers? (KOH based)  Any information would be appreciated.
>
>Thanks.
>Madan
>
>
>


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