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MEMSnet Home: MEMS-Talk: SU 8 removal
SU 8 removal
2006-07-24
Jeff chen
2006-07-24
Joseph Grogan
2006-07-25
Sreemanth M Uppuluri
2006-07-25
Lujun Zhang
2006-07-24
J.J wang
2006-07-25
Brubaker Chad
2006-07-26
ZICKAR Michaël
2006-07-26
Zhiwei Zou
2006-07-26
Florian Herrault
SU 8 removal
Jeff chen
2006-07-24
Hi, all,

Does anyone have some experience to completely remove SU8 after development?
I tried PG Remover and it didn't work well. And also plasma cleaning
under oxygen, still not working.

Thanks a lot.

Best,
Jeff
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