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MEMSnet Home: MEMS-Talk: SU 8 removal
SU 8 removal
2006-07-24
Jeff chen
2006-07-24
Joseph Grogan
2006-07-25
Sreemanth M Uppuluri
2006-07-25
Lujun Zhang
2006-07-24
J.J wang
2006-07-25
Brubaker Chad
2006-07-26
ZICKAR Michaƫl
2006-07-26
Zhiwei Zou
2006-07-26
Florian Herrault
SU 8 removal
J.J wang
2006-07-24
Hi Jeff.
The OmniCoat will help removal of the SU-8. You can try to apply it before SU-8.
Good luck
J.J. Wang

Jeff chen  wrote: Hi, all,

Does anyone have some experience to completely remove SU8 after development?
I tried PG Remover and it didn't work well. And also plasma cleaning
under oxygen, still not working.
reply
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