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MEMSnet Home: MEMS-Talk: Thin Film Index of Refraction
Thin Film Index of Refraction
2006-07-26
Adrian Brozell
Thin Film Index of Refraction
Adrian Brozell
2006-07-26
Hi,

I am attempting to measure film thicknesses of sputter coated gold with
ellipsometery.  Although i cleaned the silicon with phirana and measured
the oxide layer before sputter coating the substrate, the numbers i got
did not match the model.   Does anyone know the index of refraction for
sputtered gold??  How do sputtered layers behave optically compared to
ebeam evaporated layer??  Any reference book would also help.

currently i am using .4666-2.4083i for the index of gold

thanks

adrian
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