Dear Sir,
I've used 3 types, two extensively and one a little.

 1. vem
 2. magic
 3. L-Edit

I vote vem the best for MEMS. Magic isn't very good for MEMS as its design
rules are for circuits and MEMS designs are often in violation of proper
circuit design rules. Vem is more interactive in the sense that you can tailor
it more readily to your needs. There are many advantages for MEMS that I won't
go into here.

L-Edit has just started being used in our lab and I haven't used it enough for
a real comparison with vem, but some here like it and say they like it more
than vem.

I've used Auto-Cad for things, but never for mask layout.

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Beverley Eyre 
MEMS Research Laboratory
54-148  Engr. IV
UCLA School of Engineering and Applied Science
Los Angeles, Ca.
Phone: 310-825-0430   FAX: 310-206-8495
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