Dear Hsieh,
Why don't u try with PPR and postbake it. But it depends upon ur further
processing.
Sujatha


---------- Original Message -----------
From: "Cheng-Yu Hsieh" 
To: 
Sent: Thu, 17 Aug 2006 02:42:08 +0800
Subject: [mems-talk] Adhesives wafer bonding

> Hi Everybody,
> I am trying to bond one 4 inch silicon wafer to a 8 inch silicon wafer.
> I need a temporary bonding adhesive which I should be able to remove
> after I have done chemical mechanical planarization process on the 4
> inch wafer.
>
> Does anybody know of commercially available adhesives
> that I can use for this? I need an adhesive which is
> very  simple in it's application and ideally would
> like something which I can just apply in-between the
> two wafers and then stick them together and later
> should be able to de-bond them easily too.
>