If you are spinning onto an oxide, are you using HMDS ?
This can remove some of the moisture and improve adhesion.

I used to have a similar problem though I'm not sure if it is the same one
your talking about.. I've never come accross the term 'mousebites'.

Mike Rosa.


At 08:21 2/04/98 -0600, you wrote:
> Has anyone ever heard of this term. We are using it to describe a
>problem we are having along an exposed region of photoresist where the
>resist "pops" off leaving a semi-circle in the remaining pattern edge.
>We are using a 5 minute vapor prime but we have seen the same problem at
>lesser times so I dont think we are overpriming the wafers. You can
>immediatly tell after exposure if mousebites are there as they leave a
>bubbly area in some areas of the wafer which is visible to the eye
>before develop. This problem does not occur every time (15-20%). Any
>suggestions would be greatly appreciated.
>
>Please reply to [email protected]
>
>Regards, Pat Howell
>
>
>
>