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MEMSnet Home: MEMS-Talk: SU-8 (negative resist) Dill Parameters
SU-8 (negative resist) Dill Parameters
2006-08-29
weavers@lexmark.com
SU-8 (negative resist) Dill Parameters
weavers@lexmark.com
2006-08-29
Have Dill parameters (A,B,C Parameters) been used to characterize the
kinetics for negative photoresist?   If not, why does it work with positive
resist and not negative resist?  I have searched multiple journal citations
for SU-8/negative resist Dill Parameters and have not found any reference,
mechanisms and ect.

Regards,

Sean Weaver

reply
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