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MEMSnet Home: MEMS-Talk: Plasma chamber
Plasma chamber
2006-08-29
amron gary
2006-08-29
Scott McWilliams
2006-08-29
David Henriks
2006-08-29
Bill Moffat
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2006-08-30
Sreemanth M Uppuluri
2006-08-30
shay kaplan
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2006-08-30
Jan Michael Kubr
2006-08-30
Jack Mulligan
2006-08-30
Bill Flounders
2006-08-31
galindo818@aol.com
Plasma chamber
David Henriks
2006-08-29
Gary:

Can you provide some details about the plasma chamber you need?  Size?
Ports?  With some additional information there may be some help out
there in locating a chamber.

Best regards-

David

amron gary wrote:

>Hello all,
>
>I want build a chamber for Fluorine gas plasma. My
>questions are:
>
>1. Does someone has plasma chamber for Fluorine gas?
>2. Can someone on this forum help me in building this
>chamber?
>3. What gases can be used to create the plasma of
>flurorine? C2F2 or C2F4 or C2F6??? Thanks in advance..
>
>Gary amron
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