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MEMSnet Home: MEMS-Talk: Regarding Glass lithography
Regarding Glass lithography
2006-08-29
Kannan Ramaraj
2006-08-29
Gareth Jenkins
2006-08-30
Marc Häfner
Re: AW: [mems-talk] Regarding Glass lithography
2006-08-30
sokwon Paik
2006-09-01
walter essinger
2006-09-01
Xiaoguang "Leo" Liu
2006-09-03
walter essinger
2006-08-29
Bill Moffat
2006-08-30
Gareth Jenkins
2006-08-31
Kirt Williams
Regarding Glass lithography
Gareth Jenkins
2006-08-30
Spin coating a resist (with an adhesion promoter) may be good enough for
50 microns depth in glass but I am not sure about 200 microns (at least
in my experience). I think an additional metal masking layer is required
for this kind of depth.


Bill Moffat wrote:
> Use vacuum vapor prime deposition of HMDS to make the resist stick
> forever.
>

reply
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