A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Evaporation of Silica
Plasma chamber
2006-08-29
amron gary
2006-08-29
Scott McWilliams
2006-08-29
David Henriks
2006-08-29
Bill Moffat
Evaporation of Silica
2006-08-30
Sreemanth M Uppuluri
2006-08-30
shay kaplan
hardbaked photoresist...
2006-08-30
Jan Michael Kubr
2006-08-30
Jack Mulligan
2006-08-30
Bill Flounders
2006-08-31
galindo818@aol.com
Evaporation of Silica
Sreemanth M Uppuluri
2006-08-30
Hello Everyone,

I am trying to coat silica films on my samples using e-beam evaporation. I
need a very thin coating (< 20 nm). I am wondering if this thickness is
adequate to ensure coverage over my entire sample (0.5" * 0.5"). Please let
me know if you have any pointers in this matter.

Thanks,

Sreemanth
Purdue University
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
MEMS Technology Review
University Wafer
The Branford Group