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MEMSnet Home: MEMS-Talk: hardbaked photoresist...
Plasma chamber
2006-08-29
amron gary
2006-08-29
Scott McWilliams
2006-08-29
David Henriks
2006-08-29
Bill Moffat
Evaporation of Silica
2006-08-30
Sreemanth M Uppuluri
2006-08-30
shay kaplan
hardbaked photoresist...
2006-08-30
Jan Michael Kubr
2006-08-30
Jack Mulligan
2006-08-30
Bill Flounders
2006-08-31
galindo818@aol.com
hardbaked photoresist...
Jan Michael Kubr
2006-08-30
I have a problem in that I cannot get hardbaked PR (SPR-220) of my
surfaces, both gold and Si.

With the gold sitting on TiW, piranha is not really a feasible solution.
I have tried long o2 plasma ashes and overnight baths in heated prs-3000
with little success.

Any other solutions I can try?

Sincerely,

Michael
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