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MEMSnet Home: MEMS-Talk: Washing-away problem in non-conductive substrate EBL
Washing-away problem in non-conductive substrate EBL
2006-09-05
Hongjun-ECE
2006-09-05
Michael Rust
2006-09-06
Hongjun-ECE
Washing-away problem in non-conductive substrate EBL
Hongjun-ECE
2006-09-06
Hi Michael,

Thanks for your suggestion. I will dip an uncoated PMMA sample to the
etchant and see what is going to happen...

Hongjun

reply
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