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MEMSnet Home: MEMS-Talk: Cr etching and GaAs etching with Cl2 gas
p++ silicon membrane
2006-09-07
sebastian wicklein
Cr etching and GaAs etching with Cl2 gas
2006-09-07
weidong zhou
Cr etching and GaAs etching with Cl2 gas
weidong zhou
2006-09-07
Anybody has experience with etching these two materials in the same chamber?
Are there any cross-contamination issue associated? If so, what procedures
for cleaning?

Thanks for your help.

Weidong


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