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MEMSnet Home: MEMS-Talk: boron membrane on Si-Wafer
boron membrane on Si-Wafer
2006-09-11
sebastian wicklein
2006-09-13
neal@zbzoom.net
2006-09-14
sebastian wicklein
boron membrane on Si-Wafer
sebastian wicklein
2006-09-11
Hello,

I need Silicon wafers with a p++ doped membrane of 3-4um thickness (minimum:
10to20 atoms/cm cubic)

Is anybody able to produce such membranes?

Let me know


Cheers
Sebastian
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