A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: germanium wet isotropic etch
germanium wet isotropic etch
2006-09-13
Andrea Mazzolari
germanium wet isotropic etch
Andrea Mazzolari
2006-09-13
Hi all,
i'm looking for informations about wet isotropic etch of germanium.
Until now i've found only this article: "anisotropic etching of
germanium", sensors and actuators A 46-47 (1995) 35-37
but it's mainly dedicated to anisotropic etch!

Can someone suggest me some article or a solution ?

Thanks
Andrea

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
MEMStaff Inc.
Addison Engineering