A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Gold etching problem
Gold etching problem
2006-09-16
Sarah McQuaide
2006-09-17
[email protected]
Gold etching problem
[email protected]
2006-09-17
Sarah,

What are you using to etch your Au/Cr and is your substrate seeing heat
while the metals are on?

Brent

Anyone who can help me with the following question would be greatly
appreciated-

I make small wells in boro glass with raised lips around the edges using
a gold/cr mask. When I try to do my final gold/chrome etch to get it all
the metal off, some metal still hangs on to the edges of the wells or
around the lips. I've tried sonicating 1 hr + in gold/chrome etch but
it's not seeming to do the trick...anyone know how to comabt what I
believe is a surface tension issue
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
The Branford Group
Nano-Master, Inc.
MEMS Technology Review