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MEMSnet Home: MEMS-Talk: crucible material for evaporating Al
crucible material for evaporating Al
2006-09-20
luhao
2006-09-21
Bin Liu
2006-09-21
Shay Kaplan
Dry etch selectivity between Al and PMMA
2006-09-21
Xiaojing Zou
reducing stress in sputtered TiW
2006-09-21
Jan Michael Kubr
crucible material for evaporating Al
Shay Kaplan
2006-09-21
You can evap directly from the copper hearth or use BN crucible

Shay

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of luhao
Sent: Thursday, September 21, 2006 12:35 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] crucible material for evaporating Al

Hi all,

What's the best material of crucible for evaporating Al?  I used graphite
crucible and always end up with broken crucible.
reply
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