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MEMSnet Home: MEMS-Talk: boron stain
boron stain
2006-09-25
Tao
2006-09-26
Roger Brennan
boron stain
Tao
2006-09-25
Hi,
Does anyone have experience with Borofilm 100? I got some Boron stain on
the doping area after diffusion. It's not soluble in HF ans makes
problems in electric contact.
Can anyone give me some advice on how to clean the stain?

Thanks in advance

Hongtao

reply
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