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MEMSnet Home: MEMS-Talk: PMMA burned during Ion milling
HSQ etch mask
2006-09-23
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PMMA burned during Ion milling
2006-09-25
Xiaojing Zou
PMMA burned during Ion milling
Xiaojing Zou
2006-09-25
Hi:

   Recently I did some ion milling work with PMMA as mask but I found that
the resist is always become "dark stripe" when treating with acetone
afterward. I saw someone had this kind of problem with PR because that
resist is overbaked. I tried the cycling the etching but it did not help.
Do you guys have any other method to deal with this problem??

Xiaojing

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