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MEMSnet Home: MEMS-Talk: evaporation deposition
evaporation deposition
2006-09-25
Rupesh Sawant
2006-09-25
Karthik Sriram Lakshmi Narasimhan
2006-09-25
J.J wang
2006-09-25
prabhu arumugam
2006-09-27
[email protected]
evaporation deposition
Rupesh Sawant
2006-09-25
hi,
i tried to deposit Au on glass slide using eavpporation deposition method.
i deposited a 5 nm chromiun layer before depositing Au and then deposited
180nm Au layer. photoresist was used as a sacrifial layer. the Au layer
(along with the desired features) came out instantly when i dipped the slide
in acetone but the photoresist was still there on the slide.

could someone tell me a reson for this?

--
RUPESH SAWANT
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