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MEMSnet Home: MEMS-Talk: evaporation deposition
evaporation deposition
2006-09-25
Rupesh Sawant
2006-09-25
Karthik Sriram Lakshmi Narasimhan
2006-09-25
J.J wang
2006-09-25
prabhu arumugam
2006-09-27
bdaly@evapcoat.com
evaporation deposition
Karthik Sriram Lakshmi Narasimhan
2006-09-25
Try to keep the wafers for more time onto acetone. Use RR-4 if nothing
works.

Karthik


On 9/25/06, Rupesh Sawant  wrote:
>
> hi,
> i tried to deposit Au on glass slide using eavpporation deposition method.
> i deposited a 5 nm chromiun layer before depositing Au and then deposited
> 180nm Au layer. photoresist was used as a sacrifial layer. the Au layer
> (along with the desired features) came out instantly when i dipped the
> slide
> in acetone but the photoresist was still there on the slide.
>
> could someone tell me a reson for this?


--
Regards,
Karthik Sriram Lakshmi Narasimhan,
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