A low temperature wet oxidation is the usual fix.

Best of luck,

Roger Brennan
Applications Director
Solecon Labs
770 Trademark Drive
Reno, NV 89521-5926
[email protected]
775-853-5900 ext 108


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Tao
Sent: Monday, September 25, 2006 7:44 AM
To: General MEMS discussion
Subject: [mems-talk] boron stain


Hi,
Does anyone have experience with Borofilm 100? I got some Boron stain on
the doping area after diffusion. It's not soluble in HF ans makes
problems in electric contact.
Can anyone give me some advice on how to clean the stain?