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MEMSnet Home: MEMS-Talk: photoresist multiple coating
photoresist multiple coating
2006-09-28
Abhishek Jain
2006-09-28
abdou sar
photoresist multiple coating
Abhishek Jain
2006-09-28
Hi
I want to do multiple coatings(2-3) of resist AZ4620 or a similar
positive resist (not SU-8) to get thicknesses of 50-75um. I am looking
for a recipe to do this. Please advice if you have any experience.

Thanks
-Abhishek Jain

--
Research Assistant
Microfluidics Lab (Prof. J.D. Posner)
Department of Mechanical & Aerospace Engineering
Arizona State University
Tempe, Arizona 85281
Ph:480 727 9157
Fax: 480 965 1384
www.public.asu.edu/~ajain29
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