Hello,

You can try etching Ti with transene's TFTN. It has HCl in it, which doesn't
attack GaAs.

Deepa

Brad Cantos  wrote: Yes, this is a very strong GaAs
etchant.
Brad

On 9/26/06 7:02 AM, "[email protected]"  wrote:

> Vinay,
> Does this etch etch thourgh GaAs or AlGaAs?
> Ali
>
>
> Quoting Vinay :
>
>> Hi Ali,
>> One possible recipe to etch Ti is:
>> 20H2O(DI) : 1HF : 1H2O2.
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