On Thu, 30 Apr 1998 15:12:12 -0400 "Suresh G.K.
Ananthasuresh"  wrote:


> Dear MEMS researchers:
>
> Could anyone tell me where we can buy SOI wafers for
> a reasonable price. Our specs include: 2 in diameter,
> oxide thickness 1 - 2 um, and top silicon layer thickness
> 5 - 15 um.
>
> Thanks in advance.
> Regards,
>
> Suresh G.K. Ananthasuresh
> Assistant Professor
> 297 Towne Building, MEAM
> The University of Pennsylvania
> 220 S. 33rd Street, Philadelphia, PA 19104-6315
> --
> Towne Tel: (215) 898-7191; Grasp lab Tel: (215) 898-2430
> FAX:  (215) 573-6334
> E-mail: [email protected]
> URL: http://www.seas.upenn.edu/~gksuresh
> --
>


Suresh,

        The ones we have looked into are IBIS in
California.  They have only 4 inch wafers as far as we
know.  Would appreciate if you can let us know if you find
any 2 inch wafers yourself.  We need same diameter but
somewhat thinner top silicon layer thickness.  BTW what are
you trying to do ?


Bellave S. Shivaram
Associate Prof. of Physics
University of Virginia
Charlottesville, VA. 22901
Ph: 804-924-6818   FAX: 804-924-4576