It is the standard to sputter Pyrex Glass.  Thin films to thick films.

Loren St. Clair
Staff Engineer
Electronic Visions Inc.

Tel:    (602)437-9492, ext. 121
Fax:    (602)437-9435
Email:  lstclair@elvisions.com
Web:    http://www.elvisions.com

        -----Original Message-----
        From:   decai sun [SMTP:sun@parc.xerox.com]
        Sent:   Thursday, April 30, 1998 11:00 AM
        To:     MEMS@ISI.EDU
        Subject:        e-beam evaporation of pyrex glass

        Anyone has experience with the e-beam evaporation of Pyrex
glass? We have
        tried to evaporate Pyrex glass by e-beam and experienced flaks
on the
        surface besides good thin film deposition. Any input would be
appreciated.

        Decai
        ************************************************
        Decai Sun, Ph. D
        Electronic Materials Lab
        Xerox Palo Alto Research Center
        Palo Alto, CA 94304
        phone:650-812-4169, fax:650-812-4105
        email:sun@parc.xerox.com
        ************************************************