BURKE, JOHN wrote:
>
> Hello Colleagues,
>
> I'm looking for in-situ, contact temperature measurement on the backside
> of silicon wafers.  The wafers are in a vacuum chamber with radiant
> heating-- so no contact with something as convienient as a chuck for
> temperture measurement/approximation. Any ideas?
>
> Thanks,
> John Burke
>
>
Check out the work of Prof. Jim Sturm at Princeton's EE department.
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