Kevin,
if the MA6 is tuned well 2u min space should be easy
shay

Original Message:
-----------------
From: Kevin Christ [email protected]
Date: Mon, 09 Oct 2006 11:28:25 -0500
To: [email protected]
Subject: [mems-talk] Small SU-8 Pillars


Hello,

I would like to create a series of rows of short, round pillars out of
SU-8.  I would like the pillars to be 12 microns in diameter and 5
microns high.  Does anyone have an estimate as to how close I could
get the individual pillars to each other?  I am planning on using a
chrome-glass mask on a Karl Suss MA6/BA6 contact aligner.