Dear Mr. Burke,
I am at the office of Technology Transfer at Oak Ridge National Laboratory.
it is possible we may have the thing you are looking for. If you would
kindly send me your phone number I would be happy to talk with you. Right
now I have to run for a meeting I am already late for. regards,
Ashok (423) 574-0393



>Hello Colleagues,
>
>I'm looking for in-situ, contact temperature measurement on the backside
>of silicon wafers.  The wafers are in a vacuum chamber with radiant
>heating-- so no contact with something as convienient as a chuck for
>temperture measurement/approximation. Any ideas?
>
>Thanks,
>John Burke
>
>
>


Ashok Choudhury, Ph.D.
Licensing Executive
Office of Technology Transfer
Lockheed Martin Energy Research Corporation
701 Scarboro Road, MS 8242
Oak Ridge, TN 37831-8242

Phone : (423) 574-0393
Fax : (423) 574-9241