Yes. I have to use AZ and SU8 together. There are some reporting. But
the thickness of the two is almost the same or a thinner SU8 layer is
used. In that cases, there is no much trouble for spin of AZ later. I
am worried that thick SU8 and thin AZ design may fail.

> Hi,
>Do you have to use AZ on top of SU8? In this paper (Hung, P. J.; Lee,
P. J.; >Sabounchi, P.; Lin, R.; Lee, L. P. Biotechnology and
Bioengineering 2005, 89, 1-8.), >they get 50 micron SU8 2050 on top of
2 micron SU8 2002.

>Huaibin Zhang